Chin. J. Semicond. > 1994, Volume 15?>?Issue 9?> 611-616

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為SIMOX　SOI結構的硅膜和二氧化硅埋層厚度模型

牛國富，阮剛

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1994

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      牛國富，阮剛. 為SIMOX　SOI結構的硅膜和二氧化硅埋層厚度模型[J]. 半導體學報(英文版), 1994, 15(9): 611-616.
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      牛國富，阮剛. 為SIMOX　SOI結構的硅膜和二氧化硅埋層厚度模型[J]. 半導體學報(英文版), 1994, 15(9): 611-616.

      • Received Date: 2015-08-19

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