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Chin. J. Semicond. > 1994, Volume 15?>?Issue 7?> 450-454

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PECVDSi_3N_4鈍化膜對GaAsMESFET直流特性的影響

宮俊

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    Received: 18 August 2015 Revised: Online: Published: 01 July 1994

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      宮俊. PECVDSi_3N_4鈍化膜對GaAsMESFET直流特性的影響[J]. 半導(dǎo)體學(xué)報(bào)(英文版), 1994, 15(7): 450-454.
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      宮俊. PECVDSi_3N_4鈍化膜對GaAsMESFET直流特性的影響[J]. 半導(dǎo)體學(xué)報(bào)(英文版), 1994, 15(7): 450-454.

      • Received Date: 2015-08-18

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