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Chin. J. Semicond. > 1994, Volume 15?>?Issue 3?> 204-207

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利用電子束摻雜技術(shù)制備微米、亞微米P－MOSFET器件

李秀瓊，海潮和，楊軍

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    Received: 18 August 2015 Revised: Online: Published: 01 March 1994

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      李秀瓊，海潮和，楊軍. 利用電子束摻雜技術(shù)制備微米、亞微米P－MOSFET器件[J]. 半導(dǎo)體學(xué)報(bào)(英文版), 1994, 15(3): 204-207.
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      李秀瓊，海潮和，楊軍. 利用電子束摻雜技術(shù)制備微米、亞微米P－MOSFET器件[J]. 半導(dǎo)體學(xué)報(bào)(英文版), 1994, 15(3): 204-207.

      • Received Date: 2015-08-18

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