Abstract: Effect of hydrogenation on the luminescence properties of ZnO is investigated with low temperature photoluminescence (PL) spectrum.Hydrogen is incorporated into the ZnO crystals from a remote DC plasma.It is found that hydrogen incorporation influences the relative luminescence intensities of bound excitons,and,in particular,the intensity of I4 (3.363eV) is enhanced.Hydrogenated ZnO samples show a different temperature dependence on PL spectra from the virgin ZnO samples.PL spectra of the hydrogenated ZnO samples were measured at 4.2K from different depths below the surface.The intensity of I4 and the intensity ratio of I4 to I8 change with depth,indicating a direct connection between the incorporated hydrogen and the shallow donor.In general,hydrogenation enhances the band edge luminescence and passivates the green emission.

Key words: ZnO,  hydrogenation,  PL spectrum