Chin. J. Semicond. > 2007, Volume 28?>?Issue 5?> 783-788

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Design and Fabrication of an Accelerometer with Novel "8-Beams/Mass" Structure

Wang Yucai, Jiao Jiwei, Duan Fei, Zhang Ying, Mi Binwei, Li Jinpeng, Qian Qing and Wang Yuelin

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Abstract: A new micro-silicon capacitive accelerometer with novel "8-beams/mass" structure was designed and fabricated by applying a micro-machining process to (111) silicon wafer.The proof mass of this accelerometer is supported by eight suspension beams located symmetrically on the top/bottom surface of a (111) silicon wafer.By using an extremely slow rate of Si (111) plane etching in anisotropic KOH,along with DRIE and other MEMS processes,the dimension of these beams can be accurately controlled,and the symmetry of the "8-beams/mass" structure can be achieved.The performance of the accelerometer is measured with a typical resonance frequency of 2.08kHz,quality factor of 21.4,and sensitivity of 93.7mV/g.

Key words: accelerometer, MEMS, anisotropic etching

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    Received: 18 August 2015 Revised: 06 January 2007 Online: Published: 01 May 2007

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      Wang Yucai, Jiao Jiwei, Duan Fei, Zhang Ying, Mi Binwei, Li Jinpeng, Qian Qing, Wang Yuelin. Design and Fabrication of an Accelerometer with Novel '8-Beams/Mass' Structure[J]. Journal of Semiconductors, 2007, 28(5): 783-788. ****Wang Y C, Jiao J W, Duan F, Zhang Y, Mi B W, Li J P, Qian Q, Wang Y L. Design and Fabrication of an Accelerometer with Novel \'8-Beams/Mass\' Structure[J]. Chin. J. Semicond., 2007, 28(5): 783.
      Citation:
      Wang Yucai, Jiao Jiwei, Duan Fei, Zhang Ying, Mi Binwei, Li Jinpeng, Qian Qing, Wang Yuelin. Design and Fabrication of an Accelerometer with Novel "8-Beams/Mass" Structure[J]. Journal of Semiconductors, 2007, 28(5): 783-788. ****
      Wang Y C, Jiao J W, Duan F, Zhang Y, Mi B W, Li J P, Qian Q, Wang Y L. Design and Fabrication of an Accelerometer with Novel \'8-Beams/Mass\' Structure[J]. Chin. J. Semicond., 2007, 28(5): 783.

      Design and Fabrication of an Accelerometer with Novel "8-Beams/Mass" Structure

      • State Key Laboratories of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • Graduate University of the Chinese Academy of Sciences,Beijing 100049,China

      • State Key Laboratories of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratories of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • Graduate University of the Chinese Academy of Sciences,Beijing 100049,China

      • State Key Laboratories of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratories of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratories of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • Graduate University of the Chinese Academy of Sciences,Beijing 100049,China

      • State Key Laboratories of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratories of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • Received Date: 2015-08-18
      • Accepted Date: 2006-11-14
      • Revised Date: 2007-01-06
      • Published Date: 2007-04-29

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