Chin. J. Semicond. > 1994, Volume 15?>?Issue 9?> 638-642

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1994

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      陳茂瑞,陳坤基,姜建功,施偉華. 利用逐層生長技術制備硅薄膜的研究[J]. 半導體學報(英文版), 1994, 15(9): 638-642.
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      陳茂瑞,陳坤基,姜建功,施偉華. 利用逐層生長技術制備硅薄膜的研究[J]. 半導體學報(英文版), 1994, 15(9): 638-642.

      • Received Date: 2015-08-19

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