Chin. J. Semicond. > 1994, Volume 15?>?Issue 8?> 524-532

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    Received: 18 August 2015 Revised: Online: Published: 01 August 1994

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      亓文杰,李炳宗,黃維寧,顧志光,張翔九,盛篪,胡際璜,呂宏強,衛星,沈孝良. Co、Ti/Si1-xGex薄膜快速退火固相反應結構和組分研究[J]. 半導體學報(英文版), 1994, 15(8): 524-532.
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      亓文杰,李炳宗,黃維寧,顧志光,張翔九,盛篪,胡際璜,呂宏強,衛星,沈孝良. Co、Ti/Si1-xGex薄膜快速退火固相反應結構和組分研究[J]. 半導體學報(英文版), 1994, 15(8): 524-532.

      • Received Date: 2015-08-18

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