Chin. J. Semicond. > 1994, Volume 15?>?Issue 8?> 533-539

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用離子束輔助淀積多層薄膜技術合成Co－Si化合物薄膜的研究

楊杰，閻忻水，陶琨，范玉殿

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    Received: 18 August 2015 Revised: Online: Published: 01 August 1994

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      楊杰，閻忻水，陶琨，范玉殿. 用離子束輔助淀積多層薄膜技術合成Co－Si化合物薄膜的研究[J]. 半導體學報(英文版), 1994, 15(8): 533-539.
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      楊杰，閻忻水，陶琨，范玉殿. 用離子束輔助淀積多層薄膜技術合成Co－Si化合物薄膜的研究[J]. 半導體學報(英文版), 1994, 15(8): 533-539.

      • Received Date: 2015-08-18

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