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J. Semicond. > 2008, Volume 29?>?Issue 4?> 733-736

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Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering

Kong Jincheng, Kong Lingde, Zhao Jun, Zhang Pengju, Li Hongzhi, Li Xiongjun, Wang Shanli and Ji Rongbin

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Abstract: Amorphous HgCdTe(a-HgCdTe or a-MCT) films on glass substrate were deposited by RF magnetron sputtering technology.The amorphous structure of the MCT films were studied by XRD and AFM technology and the "growth window" of a-MCT was obtained.FTIR technology was used to study the optical properties of amorphous MCT films and the absorption coefficient of amorphous MCT films (~8E4cm-1) was obtained.We also observed three absorption regions near the optical gap of amorphous MCT.The optical gap of our a-MCT film is about 0.83eV.

Key words: amorphous MCT, RF magnetron sputtering, optical gap

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    Received: 18 August 2015 Revised: 22 November 2007 Online: Published: 01 April 2008

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      Kong Jincheng, Kong Lingde, Zhao Jun, Zhang Pengju, Li Hongzhi, Li Xiongjun, Wang Shanli, Ji Rongbin. Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering[J]. Journal of Semiconductors, 2008, 29(4): 733-736. ****Kong J C, Kong L D, Zhao J, Zhang P J, Li H Z, Li X J, Wang S L, Ji R B. Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering[J]. J. Semicond., 2008, 29(4): 733.
      Citation:
      Kong Jincheng, Kong Lingde, Zhao Jun, Zhang Pengju, Li Hongzhi, Li Xiongjun, Wang Shanli, Ji Rongbin. Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering[J]. Journal of Semiconductors, 2008, 29(4): 733-736. ****
      Kong J C, Kong L D, Zhao J, Zhang P J, Li H Z, Li X J, Wang S L, Ji R B. Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering[J]. J. Semicond., 2008, 29(4): 733.

      Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering

      • Kunming Institute of Physics,Kunming 650023,China

      • Kunming Institute of Physics,Kunming 650023,China

      • Kunming Institute of Physics,Kunming 650023,China

      • Kunming Institute of Physics,Kunming 650023,China

      • Kunming Institute of Physics,Kunming 650023,China

      • Kunming Institute of Physics,Kunming 650023,China

      • Kunming Institute of Physics,Kunming 650023,China

      • Kunming Institute of Physics,Kunming 650023,China

      • Received Date: 2015-08-18
      • Accepted Date: 2007-09-20
      • Revised Date: 2007-11-22
      • Published Date: 2008-04-03

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