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J. Semicond. > 2008, Volume 29?>?Issue 7?> 1330-1333

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Influence of the Annealing Temperature on the Structural and Optical Properties of N-Doped ZnO Films

Zhong Sheng, Xu Xiaoqiu, Sun Lijie, Lin Bixia and Fu Zhuxi

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Abstract: Nitrogen-doped ZnO (ZnO:N) films are prepared by thermal oxidation of sputtered Zn3N2 layers on Al2O3 substrate.The dependence of the structural and optical properties of the ZnO:N films on annealing temperature is investigated.X-ray Diffraction (XRD) results illustrate that the as-sputtered Zn3N2 films can be transformed into ZnO:N films after annealing at 600℃ and above.X-ray photoelectron spectroscopy (XPS) reveals that nitrogen has two chemical states in the ZnO:N films:(N2)o and No,which denote substitution of molecular N for O and atomic N for O,respectively.Hall effect measurements illustrate that the hole concentration in ZnO:N films annealed at 700℃ is the highest.The FA and DAP transition peaks are observed in low temperature photoluminescence spectra,from which the nitrogen acceptor binding energy can be obtained.

Key words: thermal oxidation, ZnO, XPS, acceptor binding energy

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    Received: 18 August 2015 Revised: 09 January 2008 Online: Published: 01 July 2008

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      Zhong Sheng, Xu Xiaoqiu, Sun Lijie, Lin Bixia, Fu Zhuxi. Influence of the Annealing Temperature on the Structural and Optical Properties of N-Doped ZnO Films[J]. Journal of Semiconductors, 2008, 29(7): 1330-1333. ****Zhong S, Xu X Q, Sun L J, Lin B X, Fu Z X. Influence of the Annealing Temperature on the Structural and Optical Properties of N-Doped ZnO Films[J]. J. Semicond., 2008, 29(7): 1330.
      Citation:
      Zhong Sheng, Xu Xiaoqiu, Sun Lijie, Lin Bixia, Fu Zhuxi. Influence of the Annealing Temperature on the Structural and Optical Properties of N-Doped ZnO Films[J]. Journal of Semiconductors, 2008, 29(7): 1330-1333. ****
      Zhong S, Xu X Q, Sun L J, Lin B X, Fu Z X. Influence of the Annealing Temperature on the Structural and Optical Properties of N-Doped ZnO Films[J]. J. Semicond., 2008, 29(7): 1330.

      Influence of the Annealing Temperature on the Structural and Optical Properties of N-Doped ZnO Films

      • Department of Physics,University of Science and Technology of China,Hefei 230026,China

      • Department of Physics,University of Science and Technology of China,Hefei 230026,China

      • Department of Physics,University of Science and Technology of China,Hefei 230026,China

      • Department of Physics,University of Science and Technology of China,Hefei 230026,China

      • Department of Physics,University of Science and Technology of China,Hefei 230026,China

      • Received Date: 2015-08-18
      • Accepted Date: 2007-12-01
      • Revised Date: 2008-01-09
      • Published Date: 2008-08-01

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