PAPERS
Liu Jie, Zhou Jicheng, Luo Hongwei, Kong Xuedong, En Yunfei, Shi Qian, He Yujuan and Lin Li
Abstract: Total dose irradiation effects of partially depleted SOI MOSFETs are studied under 10keV X-ray exposure.Results show that the front-gate characteristics do not change significantly during irradiation.An anomalous kink is observed in the back-gate logarithmic curve of both nMOS and pMOS,which is attributed to charged traps at the buried oxide/top silicon (BOX/SOI) interface during irradiation.Two-dimensional numerical simulation using MEDICI supports this conclusion.
Key words: X-ray, SOI MOSFETs, partially depleted, kink effect, total-dose irradiation
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Received: 18 August 2015 Revised: 13 August 2007 Online: Published: 01 January 2008
| Citation: |
Liu Jie, Zhou Jicheng, Luo Hongwei, Kong Xuedong, En Yunfei, Shi Qian, He Yujuan, Lin Li. A Novel Back-Gate Kink Effect in SOI MOSFETs During Ionizing Irradiation[J]. Journal of Semiconductors, 2008, 29(1): 149-152.
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Liu J, Zhou J C, Luo H W, Kong X D, En Y F, Shi Q, He Y J, Lin L. A Novel Back-Gate Kink Effect in SOI MOSFETs During Ionizing Irradiation[J]. J. Semicond., 2008, 29(1): 149.
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