Chin. J. Semicond. > 1994, Volume 15?>?Issue 12?> 832-837

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超高真空CVD極低溫低壓硅外延與高分辨TEM分析研究

葉志鎮

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    Received: 19 August 2015 Revised: Online: Published: 01 December 1994

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      葉志鎮. 超高真空CVD極低溫低壓硅外延與高分辨TEM分析研究[J]. 半導體學報(英文版), 1994, 15(12): 832-837.
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      葉志鎮. 超高真空CVD極低溫低壓硅外延與高分辨TEM分析研究[J]. 半導體學報(英文版), 1994, 15(12): 832-837.

      • Received Date: 2015-08-19

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