Chin. J. Semicond. > 1994, Volume 15?>?Issue 8?> 544-550

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    Received: 18 August 2015 Revised: Online: Published: 01 August 1994

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      何杰，顧詮，陳維德，許振嘉. CoSi_2薄膜形成過程中的反應機制[J]. 半導體學報(英文版), 1994, 15(8): 544-550.
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      何杰，顧詮，陳維德，許振嘉. CoSi_2薄膜形成過程中的反應機制[J]. 半導體學報(英文版), 1994, 15(8): 544-550.

      • Received Date: 2015-08-18

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