Chin. J. Semicond. > 1995, Volume 16?>?Issue 7?> 528-532

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    Received: 19 August 2015 Revised: Online: Published: 01 July 1995

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      顧書林，王榮華，張榮，韓平，鄭有. SiH＿4和GeH＿4生長SiGe合金的CVD反應研究[J]. 半導體學報(英文版), 1995, 16(7): 528-532.
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      顧書林，王榮華，張榮，韓平，鄭有. SiH＿4和GeH＿4生長SiGe合金的CVD反應研究[J]. 半導體學報(英文版), 1995, 16(7): 528-532.

      • Received Date: 2015-08-19

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