Chin. J. Semicond. > 2007, Volume 28?>?Issue 8?> 1242-1247

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MSM Ultraviolet Photodetector of Mg0.2Zn0.8O by LMBE

Bi Zhen, Zhang Jingwen, Bian Xuming, Wang Dong, Zhang Xin'+C143an and Hou Xun

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Abstract: Mg0.2Zn0.8O films were deposited on the c-plane of sapphire by LMBE with two different structures.The films were all annealed in air at 900℃ for 1h.Then interdigital Al electrodes were evaporated on the films using the standard lift-off technique.A Mg0.2Zn0.8O ultraviolet photodetector was obtained,with a fast rise time of 14.3ns and fall time of 6.5μs.

Key words: Mg0.2Zn0.8O film, ultraviolet photodetector, response time

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    Received: 18 August 2015 Revised: 24 March 2007 Online: Published: 01 August 2007

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      Bi Zhen, Zhang Jingwen, Bian Xuming, Wang Dong, Zhang Xin'+C143an, Hou Xun. MSM Ultraviolet Photodetector of Mg0.2Zn0.8O by LMBE[J]. Journal of Semiconductors, 2007, 28(8): 1242-1247. ****Bi Z, Zhang J W, Bian X M, Wang D, Zhang X, Hou X. MSM Ultraviolet Photodetector of Mg0.2Zn0.8O by LMBE[J]. Chin. J. Semicond., 2007, 28(8): 1242.
      Citation:
      Bi Zhen, Zhang Jingwen, Bian Xuming, Wang Dong, Zhang Xin'+C143an, Hou Xun. MSM Ultraviolet Photodetector of Mg0.2Zn0.8O by LMBE[J]. Journal of Semiconductors, 2007, 28(8): 1242-1247. ****
      Bi Z, Zhang J W, Bian X M, Wang D, Zhang X, Hou X. MSM Ultraviolet Photodetector of Mg0.2Zn0.8O by LMBE[J]. Chin. J. Semicond., 2007, 28(8): 1242.

      MSM Ultraviolet Photodetector of Mg0.2Zn0.8O by LMBE

      • School of Science,Xi'an Jiaotong University,Xi'an 710049,China

      • Key Laboratory of Photonics Technology for Information,Xi'an Jiaotong University,Xi'an 710049,China

      • School of Physics and Photoelectronics,Henan University,Kaifeng 475001,China

      • Key Laboratory of Photonics Technology for Information,Xi'an Jiaotong University,Xi'an 710049,China

      • Key Laboratory of Photonics Technology for Information,Xi'an Jiaotong University,Xi'an 710049,China

      • Key Laboratory of Photonics Technology for Information,Xi'an Jiaotong University,Xi'an 710049,China

      • Key Laboratory of Photonics Technology for Information,Xi'an Jiaotong University,Xi'an 710049,China

      • School of Physics and Photoelectronics,Henan University,Kaifeng 475001,China

      • School of Science,Xi'an Jiaotong University,Xi'an 710049,China

      • Key Laboratory of Photonics Technology for Information,Xi'an Jiaotong University,Xi'an 710049,China

      • School of Physics and Photoelectronics,Henan University,Kaifeng 475001,China

      • Received Date: 2015-08-18
      • Accepted Date: 2006-11-28
      • Revised Date: 2007-03-24
      • Published Date: 2007-08-08

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