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J. Semicond. > 2008, Volume 29?>?Issue 5?> 893-897

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Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser

Chen Rui, Lin Guijiang, Chen Songyan, Li Cheng, Lai Hongkai and Yu Jinzhong

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Abstract: The waveguide design is one of the most important parts in a terahertz quantum cascade laser(QCL).Si/SiGe QCL waveguides,based on the Drude model and finite-difference time-domain (FDTD) method,are designed by the traditional refractive index waveguide structure,the single-sided metal structure,the double-metal clad structure,and a novel metal/metal silicide structure.The metal/metal silicide structure,showing high modal confinement,is convenient in process engineering and is expected to be a viable waveguide solution for Si/SiGe QCLs in the THz range.

Key words: terahertz, Si/SiGe, quantum cascade laser, waveguide

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    Received: 18 August 2015 Revised: 06 January 2008 Online: Published: 01 May 2008

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      Chen Rui, Lin Guijiang, Chen Songyan, Li Cheng, Lai Hongkai, Yu Jinzhong. Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser[J]. Journal of Semiconductors, 2008, 29(5): 893-897. ****Chen R, Lin G J, Chen S Y, Li C, Lai H K, Yu J Z. Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser[J]. J. Semicond., 2008, 29(5): 893.
      Citation:
      Chen Rui, Lin Guijiang, Chen Songyan, Li Cheng, Lai Hongkai, Yu Jinzhong. Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser[J]. Journal of Semiconductors, 2008, 29(5): 893-897. ****
      Chen R, Lin G J, Chen S Y, Li C, Lai H K, Yu J Z. Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser[J]. J. Semicond., 2008, 29(5): 893.

      Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser

      • Department of Physics,Semiconductor Photonics Research Center, Xiamen University,Xiamen 361005,China

      • Department of Physics,Semiconductor Photonics Research Center, Xiamen University,Xiamen 361005,China

      • Department of Physics,Semiconductor Photonics Research Center, Xiamen University,Xiamen 361005,China

      • Department of Physics,Semiconductor Photonics Research Center, Xiamen University,Xiamen 361005,China

      • Department of Physics,Semiconductor Photonics Research Center, Xiamen University,Xiamen 361005,China

      • Department of Physics,Semiconductor Photonics Research Center, Xiamen University,Xiamen 361005,China

      • Received Date: 2015-08-18
      • Accepted Date: 2007-11-20
      • Revised Date: 2008-01-06
      • Published Date: 2008-05-05

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