Chin. J. Semicond. > 1994, Volume 15?>?Issue 11?> 768-773

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1994

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      鮑敏杭，沈紹群，胡澄宇，馬青華. 硅各向異性腐蝕＜110＞條補償圖形腐蝕前沿控制[J]. 半導體學報(英文版), 1994, 15(11): 768-773.
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      鮑敏杭，沈紹群，胡澄宇，馬青華. 硅各向異性腐蝕＜110＞條補償圖形腐蝕前沿控制[J]. 半導體學報(英文版), 1994, 15(11): 768-773.

      • Received Date: 2015-08-19

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