Abstract: This paper presents a novel micro-structure ethanol gas sensor.The heater electrodes and signal electrodes were designed on the same plane in order to reduce cross-talk and make the fabrication easier.The whole design has been simulated using a 3D electro-thermo-mechanical finite element model through Ansys.The nano complex oxide La_0.7Sr_0.3FeO₃ is employed to act as sensitive material coated on the surface of the substrate. Experimental results show that the sensitivity of this novel sensor is 8.0 when the concentration of the ethanol is 500ppm, the power consumption is approximately two thirds of that of commercial sintering gas sensors, the response time is about 1.5s, and the recovery time is about 2.5s.

Key words: La_0.7Sr_0.3FeO₃, nano material, micro-structure, low power consumption, ethanol, gas sensor