Chin. J. Semicond. > 2007, Volume 28?>?Issue 10?> 1630-1635

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A Novel Micromachined x-Axis Tuning Fork Gyroscope Based on "8-Beams/Proofmass" Structure

Duan Fei, Jiao Jiwei, Wang Yucai, Zhang Ying, Mi Binwei, Li Jinpeng, Qian Qing and Wang Yuelin

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Abstract: A novel x-axis tuning fork MEMS gyroscope with "8-beams/proofmass" structure for detecting the Coriolis effect is presented.Compared with the common single-plane beams,the 8 vertical beams,symmetrically located at the top and bottom sides,more stably suspend the large thick proof mass,resulting in large capacitance variation and low mechanical noise.Bulk-micromachining technology is applied to obtain the large proof mass and twin dual beams.During the fabrication process,the dimensions of the beams are precisely confined by thermal oxide-protected limit trench sidewalls and the extremely slowly etched (111)-planes;therefore a small mismatch of less than 30Hz is achieved before tuning.Initial testing shows a sensitivity of 0.15mV/(°/s) and a rate resolution around 0.1°/s under atmosphere pressure.

Key words: MEMS, x-axis gyroscope, tuning fork gyroscope,  "8懸臂梁-質量塊”結構, 限制槽,  (111）硅晶圓

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    Received: 18 August 2015 Revised: 08 May 2007 Online: Published: 01 October 2007

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      Duan Fei, Jiao Jiwei, Wang Yucai, Zhang Ying, Mi Binwei, Li Jinpeng, Qian Qing, Wang Yuelin. A Novel Micromachined x-Axis Tuning Fork Gyroscope Based on '8-Beams/Proofmass' Structure[J]. Journal of Semiconductors, 2007, 28(10): 1630-1635. ****Duan F, Jiao J W, Wang Y C, Zhang Y, Mi B W, Li J P, Qian Q, Wang Y L. A Novel Micromachined x-Axis Tuning Fork Gyroscope Based on \'8-Beams/Proofmass\' Structure[J]. Chin. J. Semicond., 2007, 28(10): 1630.
      Citation:
      Duan Fei, Jiao Jiwei, Wang Yucai, Zhang Ying, Mi Binwei, Li Jinpeng, Qian Qing, Wang Yuelin. A Novel Micromachined x-Axis Tuning Fork Gyroscope Based on "8-Beams/Proofmass" Structure[J]. Journal of Semiconductors, 2007, 28(10): 1630-1635. ****
      Duan F, Jiao J W, Wang Y C, Zhang Y, Mi B W, Li J P, Qian Q, Wang Y L. A Novel Micromachined x-Axis Tuning Fork Gyroscope Based on \'8-Beams/Proofmass\' Structure[J]. Chin. J. Semicond., 2007, 28(10): 1630.

      A Novel Micromachined x-Axis Tuning Fork Gyroscope Based on "8-Beams/Proofmass" Structure

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • Graduate University of the Chinese Academy of Sciences,Beijing 100039,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • Graduate University of the Chinese Academy of Sciences,Beijing 100039,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • Received Date: 2015-08-18
      • Accepted Date: 2007-03-27
      • Revised Date: 2007-05-08
      • Published Date: 2007-09-26

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