Chin. J. Semicond. > 1995, Volume 16?>?Issue 10?> 772-778

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    Received: 19 August 2015 Revised: Online: Published: 01 October 1995

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      康一秀，趙渭江，王宇鋼，張利春，虞福春. 多能MeV硼離子注入單晶硅形成特殊形狀載流子分布[J]. 半導體學報(英文版), 1995, 16(10): 772-778.
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      康一秀，趙渭江，王宇鋼，張利春，虞福春. 多能MeV硼離子注入單晶硅形成特殊形狀載流子分布[J]. 半導體學報(英文版), 1995, 16(10): 772-778.

      • Received Date: 2015-08-19

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