Chin. J. Semicond. > 1994, Volume 15?>?Issue 1?> 29-34

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    Received: 18 August 2015 Revised: Online: Published: 01 January 1994

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      錢鋼，張利春，閻桂珍，王詠梅，張大成，王陽元. 一種新的硅深槽刻蝕技術研究[J]. 半導體學報(英文版), 1994, 15(1): 29-34.
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      錢鋼，張利春，閻桂珍，王詠梅，張大成，王陽元. 一種新的硅深槽刻蝕技術研究[J]. 半導體學報(英文版), 1994, 15(1): 29-34.

      • Received Date: 2015-08-18

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