Chin. J. Semicond. > 1994, Volume 15?>?Issue 1?> 23-28

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硅表面氧化膜的X光電子譜及部分參數固定法曲線擬合

季振國 and 汪雷，袁駿

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    Received: 18 August 2015 Revised: Online: Published: 01 January 1994

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      季振國, 汪雷，袁駿. 硅表面氧化膜的X光電子譜及部分參數固定法曲線擬合[J]. 半導體學報(英文版), 1994, 15(1): 23-28.
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      季振國, 汪雷，袁駿. 硅表面氧化膜的X光電子譜及部分參數固定法曲線擬合[J]. 半導體學報(英文版), 1994, 15(1): 23-28.

      • Received Date: 2015-08-18

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