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Received: 19 August 2015 Revised: Online: Published: 01 September 1994
| Citation: |
陳茂瑞,陳坤基,姜建功,施偉華. 利用逐層生長技術制備硅薄膜的研究[J]. 半導體學報(英文版), 1994, 15(9): 638-642.
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