Chin. J. Semicond. > 2007, Volume 28?>?Issue 10?> 1551-1554

PAPERS

Elastic-Plastic Mechanical Properties of AlxGa1-xN Thin Films with High Al Composition

Xu Fujun, Shen Bo, Wang Maojun, Xu jian, Miao Zhenlin, Yang Zhijian, Qin Zhixin, Zhang Guoyi, Lin Bing and Bai Shulin

+ Author Affiliations

PDF

Abstract: The elastic-plastic mechanical properties of AlxGa1-xN thin films with high Al composition are investigated by the nano-indentation technique.It is found that the Young’s modulus E of the films and the shear stress to produce the plastic deformation in AlxGa1-xN films increase with increasing Al composition,while the occurrence of the clear and sudden displacement discontinuity ( "pop-in" ) in the plastic deformation (PD) process decreases.With increasing Al composition,it is believed that the increase of the bond strength and the decrease of the stress due to the lesser lattice mismatch between AlxGa1-xN films and AlN/sapphire templates result in more resistance to the formation of dislocations,which is responsible for the "pop-in" behavior in AlxGa1-xN films.

Key words: AlxGa1-xN, Young’s modulus, mechanical properties, plastic deformation

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 3841 Times PDF downloads: 1620 Times Cited by: 0 Times

    History

    Received: 18 August 2015 Revised: 23 May 2007 Online: Published: 01 October 2007

    Catalog

      Email This Article

      User name:
      Email:*請輸入正確郵箱
      Code:*驗證碼錯誤
      Xu Fujun, Shen Bo, Wang Maojun, Xu jian, Miao Zhenlin, Yang Zhijian, Qin Zhixin, Zhang Guoyi, Lin Bing, Bai Shulin. Elastic-Plastic Mechanical Properties of AlxGa1-xN Thin Films with High Al Composition[J]. Journal of Semiconductors, 2007, 28(10): 1551-1554. ****Xu F J, Shen B, Wang M J, Xu J, Miao Z L, Yang Z J, Qin Z X, Zhang G Y, Lin B, Bai S L. Elastic-Plastic Mechanical Properties of AlxGa1-xN Thin Films with High Al Composition[J]. Chin. J. Semicond., 2007, 28(10): 1551.
      Citation:
      Xu Fujun, Shen Bo, Wang Maojun, Xu jian, Miao Zhenlin, Yang Zhijian, Qin Zhixin, Zhang Guoyi, Lin Bing, Bai Shulin. Elastic-Plastic Mechanical Properties of AlxGa1-xN Thin Films with High Al Composition[J]. Journal of Semiconductors, 2007, 28(10): 1551-1554. ****
      Xu F J, Shen B, Wang M J, Xu J, Miao Z L, Yang Z J, Qin Z X, Zhang G Y, Lin B, Bai S L. Elastic-Plastic Mechanical Properties of AlxGa1-xN Thin Films with High Al Composition[J]. Chin. J. Semicond., 2007, 28(10): 1551.

      Elastic-Plastic Mechanical Properties of AlxGa1-xN Thin Films with High Al Composition

      • State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China

      • State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China

      • State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China

      • State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China

      • State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China

      • State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China

      • State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China

      • State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China

      • Department of Mechanics and Engineering Science,Peking University,Beijing 100871,China

      • Department of Mechanics and Engineering Science,Peking University,Beijing 100871,China

      • Received Date: 2015-08-18
      • Accepted Date: 2007-04-17
      • Revised Date: 2007-05-23
      • Published Date: 2007-09-26

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return