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Chin. J. Semicond. > 1994, Volume 15?>?Issue 6?> 367-372

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氫等離子體對（Pt及其硅化物）／Si界面的雜質／缺陷態(tài)和勢壘的影響

丁孫安，許振嘉

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    Received: 18 August 2015 Revised: Online: Published: 01 June 1994

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      丁孫安，許振嘉. 氫等離子體對（Pt及其硅化物）／Si界面的雜質／缺陷態(tài)和勢壘的影響[J]. 半導體學報(英文版), 1994, 15(6): 367-372.
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      丁孫安，許振嘉. 氫等離子體對（Pt及其硅化物）／Si界面的雜質／缺陷態(tài)和勢壘的影響[J]. 半導體學報(英文版), 1994, 15(6): 367-372.

      • Received Date: 2015-08-18

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