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Chin. J. Semicond. > 1994, Volume 15?>?Issue 6?> 388-392

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優(yōu)質(zhì)高阻異型厚層硅外延IGBT材料n~－／n~＋／p~＋

楊謨?nèi)A，黎展榮

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    Received: 18 August 2015 Revised: Online: Published: 01 June 1994

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      楊謨?nèi)A，黎展榮. 優(yōu)質(zhì)高阻異型厚層硅外延IGBT材料n~－／n~＋／p~＋[J]. 半導(dǎo)體學(xué)報(英文版), 1994, 15(6): 388-392.
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      楊謨?nèi)A，黎展榮. 優(yōu)質(zhì)高阻異型厚層硅外延IGBT材料n~－／n~＋／p~＋[J]. 半導(dǎo)體學(xué)報(英文版), 1994, 15(6): 388-392.

      • Received Date: 2015-08-18

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