Abstract: The design,fabrication,and test results of a 2D thermal wind sensor are presented.The wind sensor measures wind speed and direction by calorimetric principle in constant power mode.Heater and detector resistors are fabricated on glass substrate using a lift-off process.The fabrication is simple and reliable,and good thermal isolation and high sensitivity are achieved.The sensor can detect wind speed in the range of 10m/s and flow direction over 360° with an error of less than 8°.The response time of the sensor is less than 1s,and the heat power is 10mW.

Key words: MEMS, lift-off process, wind speed, wind direction, flow sensor