Abstract: Based on probability and statistical theory,pulse and step acceleration signal response models of capacitive micro-accelerometer with single-sided driving mode and double-sided driving mode are investigated,respectively,which are established on the assumption that the comb gaps conform to the uniform distribution within a given scope induced by the MEMS processing non-ideality.The precision of the models has been verified by the FEA and monte carlo methods with ANSYS software.The deviation between them is less than 10%.The models suggest that the reliable operation ranges of the accelerometers will decrease 10%~15% when the comb gaps deviate 0~20% from the ideal value.The models can be used in the estimation of the reliable operation ranges of capacitive accelerometers.

Key words: micro-accelerometers, comb gap, pulse and step signal response models, reliable operation range