Chin. J. Semicond. > 2007, Volume 28?>?Issue 1?> 113-116

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Design and Mechanical Characteristics of Novel MEMS Microneedles

Sun Xiao, Jia Shuhai, Zhu Jun and Li Yigui

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Abstract: Three novel MEMS microneedles are designed and fabricated.Aiming at practical applications,the mechanical characteristics of the microneedles and process of fluid flowing through the microchannels are studied through both theoretical analysis and numerical simulation with the finite element method.The results show that the microneedles designed here are strong enough to guarantee safe injection through skin,and they are suitable for delivering drugs in micro-volumes.

Key words: MEMS, microneedle, drug delivery, finite element method

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    Received: 18 August 2015 Revised: 04 August 2006 Online: Published: 01 January 2007

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      Sun Xiao, Jia Shuhai, Zhu Jun, Li Yigui. Design and Mechanical Characteristics of Novel MEMS Microneedles[J]. Journal of Semiconductors, 2007, 28(1): 113-116. ****Sun X, Jia S H, Zhu J, Li Y G. Design and Mechanical Characteristics of Novel MEMS Microneedles[J]. Chin. J. Semicond., 2007, 28(1): 113.
      Citation:
      Sun Xiao, Jia Shuhai, Zhu Jun, Li Yigui. Design and Mechanical Characteristics of Novel MEMS Microneedles[J]. Journal of Semiconductors, 2007, 28(1): 113-116. ****
      Sun X, Jia S H, Zhu J, Li Y G. Design and Mechanical Characteristics of Novel MEMS Microneedles[J]. Chin. J. Semicond., 2007, 28(1): 113.

      Design and Mechanical Characteristics of Novel MEMS Microneedles

      • Department of Optical Information Science and Technology,School of Science,Xi’an Jiaotong University,Xi’an 710049,China

      • Department of Optical Information Science and Technology,School of Science,Xi’an Jiaotong University,Xi’an 710049,China

      • Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200030,China

      • Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200030,China

      • Received Date: 2015-08-18
      • Accepted Date: 2006-07-10
      • Revised Date: 2006-08-04
      • Published Date: 2006-12-26

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