Chin. J. Semicond. > 1994, Volume 15?>?Issue 11?> 737-740

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1994

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      張鵬飛，侯東彥，楊景銘，錢佩信，羅臺秦. 紅外區熔再結晶SOI中形貌缺陷的產生與抑制[J]. 半導體學報(英文版), 1994, 15(11): 737-740.
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      張鵬飛，侯東彥，楊景銘，錢佩信，羅臺秦. 紅外區熔再結晶SOI中形貌缺陷的產生與抑制[J]. 半導體學報(英文版), 1994, 15(11): 737-740.

      • Received Date: 2015-08-19

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