Chin. J. Semicond. > 2007, Volume 28?>?Issue 2?> 302-307

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Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer

Xu Jingbo, Zhao Yulong, Jiang Zhuangde, Zhang Dacheng, Yang Fang and Sun Jian

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Abstract: A monolithic silicon multi-sensor on SOI wafer that consists of a three-axis piezoresistive accelerometer,a piezoresistive absolute pressure sensor,and a silicon thermistor temperature sensor is presented.The fabrication process of the sensor is described.An effective micromachining process is developed to improve the reliability of the metal wire in the multi-sensor and to avoid adhesion between the PYREX glass and silicon mass in the process of anodic bonding.Finally,the measurement results of the sensor are shown.

Key words: monolithic multi-sensor, SOI, MEMS

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    Received: 18 August 2015 Revised: 07 October 2006 Online: Published: 01 February 2007

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      Xu Jingbo, Zhao Yulong, Jiang Zhuangde, Zhang Dacheng, Yang Fang, Sun Jian. Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer[J]. Journal of Semiconductors, 2007, 28(2): 302-307. ****Xu J B, Zhao Y L, Jiang Z D, Zhang D C, Yang F, Sun J. Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer[J]. Chin. J. Semicond., 2007, 28(2): 302.
      Citation:
      Xu Jingbo, Zhao Yulong, Jiang Zhuangde, Zhang Dacheng, Yang Fang, Sun Jian. Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer[J]. Journal of Semiconductors, 2007, 28(2): 302-307. ****
      Xu J B, Zhao Y L, Jiang Z D, Zhang D C, Yang F, Sun J. Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer[J]. Chin. J. Semicond., 2007, 28(2): 302.

      Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer

      • State Key Laboratory of Mechanical Manufacturing Systems,Xi'an Jiaotong University,Xi'an 710049,China

      • State Key Laboratory of Mechanical Manufacturing Systems,Xi'an Jiaotong University,Xi'an 710049,China

      • State Key Laboratory of Mechanical Manufacturing Systems,Xi'an Jiaotong University,Xi'an 710049,China

      • Institute of Microelectronics,Peking University,Beijing 100871,China

      • Institute of Microelectronics,Peking University,Beijing 100871,China

      • State Key Laboratory of Mechanical Manufacturing Systems,Xi'an Jiaotong University,Xi'an 710049,China

      • Received Date: 2015-08-18
      • Accepted Date: 2006-07-18
      • Revised Date: 2006-10-07
      • Published Date: 2007-01-30

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