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Chin. J. Semicond. > 1994, Volume 15?>?Issue 4?> 235-242

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    Received: 18 August 2015 Revised: Online: Published: 01 April 1994

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      劉平，李炳宗，孫臻，顧志光，黃維寧，周祖堯，倪如山. Co／Ti／Si三元固相反應(yīng)外延生長CoSi2薄膜[J]. 半導(dǎo)體學(xué)報(bào)(英文版), 1994, 15(4): 235-242.
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      劉平，李炳宗，孫臻，顧志光，黃維寧，周祖堯，倪如山. Co／Ti／Si三元固相反應(yīng)外延生長CoSi2薄膜[J]. 半導(dǎo)體學(xué)報(bào)(英文版), 1994, 15(4): 235-242.

      • Received Date: 2015-08-18

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