Chin. J. Semicond. > 1996, Volume 17?>?Issue 1?> 11-15

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    Received: 18 August 2015 Revised: Online: Published: 01 January 1996

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      李映雪，奚雪梅，王兆江，張興，王陽元，林成魯. 退火氣氛對SIMOX材料Si／SiO_2界面特性的影響[J]. 半導體學報(英文版), 1996, 17(1): 11-15.
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      李映雪，奚雪梅，王兆江，張興，王陽元，林成魯. 退火氣氛對SIMOX材料Si／SiO_2界面特性的影響[J]. 半導體學報(英文版), 1996, 17(1): 11-15.

      • Received Date: 2015-08-18

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