Chin. J. Semicond. > 1995, Volume 16?>?Issue 1?> 36-41

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    Received: 19 August 2015 Revised: Online: Published: 01 January 1995

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      張燕文，姬成周，李國輝，王文勛. MeV~（28）Si~＋注入GaAs的兩步快退火行為[J]. 半導體學報(英文版), 1995, 16(1): 36-41.
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      張燕文，姬成周，李國輝，王文勛. MeV~（28）Si~＋注入GaAs的兩步快退火行為[J]. 半導體學報(英文版), 1995, 16(1): 36-41.

      • Received Date: 2015-08-19

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