Chin. J. Semicond. > 2007, Volume 28?>?Issue 5?> 711-716

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Preparation and Phase Analysis of PZT Ceramic Targets

He Linxiang, Peng Gang, Yang Weiming, Zheng Chaodan, Yu Jun and Wang Yunbo

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Abstract: A series of PZT ceramic targets are prepared by traditional solid-phase reactive sintering,and their phase composition is examined by X-ray diffraction.It is shown that the existence of excess PbO could greatly inhibit the decomposition of PbZrO3 as well as the formation of pyrochlore,thus stabilizing the perovskite phase.However,excess PbO would make the ceramic composition change locally,thereby degrading the uniformity of the ceramic targets.In addition,one sole ceramic target fabricated by traditional solid-phase sintering tends to be stratified,which could be improved by sintering several samples or adopting advanced sintering technology.

Key words: PZT, solid-phase reaction, sintering, perovskite, pyrochlore

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    Received: 18 August 2015 Revised: 21 November 2006 Online: Published: 01 May 2007

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      He Linxiang, Peng Gang, Yang Weiming, Zheng Chaodan, Yu Jun, Wang Yunbo. Preparation and Phase Analysis of PZT Ceramic Targets[J]. Journal of Semiconductors, 2007, 28(5): 711-716. ****He L X, Peng G, Yang W M, Zheng C D, Yu J, Wang Y B. Preparation and Phase Analysis of PZT Ceramic Targets[J]. Chin. J. Semicond., 2007, 28(5): 711.
      Citation:
      He Linxiang, Peng Gang, Yang Weiming, Zheng Chaodan, Yu Jun, Wang Yunbo. Preparation and Phase Analysis of PZT Ceramic Targets[J]. Journal of Semiconductors, 2007, 28(5): 711-716. ****
      He L X, Peng G, Yang W M, Zheng C D, Yu J, Wang Y B. Preparation and Phase Analysis of PZT Ceramic Targets[J]. Chin. J. Semicond., 2007, 28(5): 711.

      Preparation and Phase Analysis of PZT Ceramic Targets

      • Department of Electronic Science and Technology,Huazhong University of Science and Technology,Wuhan 430074,China

      • Department of Electronic Science and Technology,Huazhong University of Science and Technology,Wuhan 430074,China

      • Department of Electronic Science and Technology,Huazhong University of Science and Technology,Wuhan 430074,China

      • Department of Electronic Science and Technology,Huazhong University of Science and Technology,Wuhan 430074,China

      • Department of Electronic Science and Technology,Huazhong University of Science and Technology,Wuhan 430074,China

      • Department of Electronic Science and Technology,Huazhong University of Science and Technology,Wuhan 430074,China

      • Received Date: 2015-08-18
      • Accepted Date: 2006-11-06
      • Revised Date: 2006-11-21
      • Published Date: 2007-04-29

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