Chin. J. Semicond. > 1995, Volume 16?>?Issue 2?> 149-152

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    Received: 19 August 2015 Revised: Online: Published: 01 February 1995

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      孫曦慶,謝會開,劉理天,李志堅,錢佩信. 一種硅基集成微晃動馬達[J]. 半導體學報(英文版), 1995, 16(2): 149-152.
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      孫曦慶,謝會開,劉理天,李志堅,錢佩信. 一種硅基集成微晃動馬達[J]. 半導體學報(英文版), 1995, 16(2): 149-152.

      • Received Date: 2015-08-19

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