Chin. J. Semicond. > 2007, Volume 28?>?Issue 12?> 2011-2017

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Simulation of the Diffraction Effect in Exposure on a SU-8 Photoresist and the Glycerol Compensated Method

Zhu Zhen, Huang Qing’an, Li Weihua, Zhou Zaifa and Feng Ming

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Abstract: According to a Fresnel diffraction model,and considering the reflection and refraction at the glycerol/SU-8 interface,this paper simulates the aerial image when glycerol is applied between the photomask and resist.Compared to the experimental results,the model can describe the lithography process competently and be applied in design.

Key words: SU-8 photoresist, Fresnel diffraction, glycerol

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    Received: 18 August 2015 Revised: 14 July 2007 Online: Published: 01 December 2007

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      Zhu Zhen, Huang Qing’an, Li Weihua, Zhou Zaifa, Feng Ming. Simulation of the Diffraction Effect in Exposure on a SU-8 Photoresist and the Glycerol Compensated Method[J]. Journal of Semiconductors, 2007, 28(12): 2011-2017. ****Zhu Z, Huang Q, Li W H, Zhou Z F, Feng M. Simulation of the Diffraction Effect in Exposure on a SU-8 Photoresist and the Glycerol Compensated Method[J]. Chin. J. Semicond., 2007, 28(12): 2011.
      Citation:
      Zhu Zhen, Huang Qing’an, Li Weihua, Zhou Zaifa, Feng Ming. Simulation of the Diffraction Effect in Exposure on a SU-8 Photoresist and the Glycerol Compensated Method[J]. Journal of Semiconductors, 2007, 28(12): 2011-2017. ****
      Zhu Z, Huang Q, Li W H, Zhou Z F, Feng M. Simulation of the Diffraction Effect in Exposure on a SU-8 Photoresist and the Glycerol Compensated Method[J]. Chin. J. Semicond., 2007, 28(12): 2011.

      Simulation of the Diffraction Effect in Exposure on a SU-8 Photoresist and the Glycerol Compensated Method

      • Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

      • Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

      • Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

      • Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

      • Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

      • Received Date: 2015-08-18
      • Accepted Date: 2007-05-25
      • Revised Date: 2007-07-14
      • Published Date: 2007-11-28

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