Chin. J. Semicond. > 2007, Volume 28?>?Issue 2?> 154-158

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InP/InGaAs Heterojunction Bipolar Transistor with Base μ-Bridge and Emitter Air-Bridge

Yu Jinyong, Liu Xinyu, Su Shubing, Wang Runmei, Xu Anhuai and Qi Ming

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Abstract: An InP-based single-heterojunction bipolar transistor (SHBT) with base μ-bridge and emitter air-bridge is reported.Because those bridges reduce parasitic capacitance greatly,the cutoff frequency fT of the 2μm×12.5μm InP SHBT without de-embedding reaches 178GHz.It is critical in high-speed low power applications,such as OEIC receivers and analog-to-digital converters.

Key words: InP, HBT, μ-bridge, air-bridge, self-aligning

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    Received: 18 August 2015 Revised: 12 September 2006 Online: Published: 01 February 2007

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      Yu Jinyong, Liu Xinyu, Su Shubing, Wang Runmei, Xu Anhuai, Qi Ming. InP/InGaAs Heterojunction Bipolar Transistor with Base μ-Bridge and Emitter Air-Bridge[J]. Journal of Semiconductors, 2007, 28(2): 154-158. ****Yu J Y, Liu X Y, Su S B, Wang R M, Xu A H, Qi M. InP/InGaAs Heterojunction Bipolar Transistor with Base μ-Bridge and Emitter Air-Bridge[J]. Chin. J. Semicond., 2007, 28(2): 154.
      Citation:
      Yu Jinyong, Liu Xinyu, Su Shubing, Wang Runmei, Xu Anhuai, Qi Ming. InP/InGaAs Heterojunction Bipolar Transistor with Base μ-Bridge and Emitter Air-Bridge[J]. Journal of Semiconductors, 2007, 28(2): 154-158. ****
      Yu J Y, Liu X Y, Su S B, Wang R M, Xu A H, Qi M. InP/InGaAs Heterojunction Bipolar Transistor with Base μ-Bridge and Emitter Air-Bridge[J]. Chin. J. Semicond., 2007, 28(2): 154.

      InP/InGaAs Heterojunction Bipolar Transistor with Base μ-Bridge and Emitter Air-Bridge

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • Received Date: 2015-08-18
      • Accepted Date: 2006-08-11
      • Revised Date: 2006-09-12
      • Published Date: 2007-01-30

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