Chin. J. Semicond. > 2007, Volume 28?>?Issue 9?> 1454-1458

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A Tunable Micromechanical Capacitor Driven by Electrostatic Force

Fang Dongming, Fu Shi, Zhou Yong and Zhao Xiaolin

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Abstract: A radio frequency (RF) tunable micromechanical capacitor with a high quality factor driven by the electrostatic force was fabricated using simple MEMS technology.The surface profile and the displacement of the variable capacitor at different values of applied voltage are measured by using a WYKO NT1100 optical surface profiler.The measured results show that the pull-in voltage is 13.5V,the tuning ratio of the capacitor is 13.1∶1,and the quality factor and the capacitance are 51.6 and 0.79pF at 1GHz,respectively.

Key words: tunable capacitor, RF MEMS, quality factor

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    Received: 18 August 2015 Revised: 16 April 2007 Online: Published: 01 September 2007

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      Fang Dongming, Fu Shi, Zhou Yong, Zhao Xiaolin. A Tunable Micromechanical Capacitor Driven by Electrostatic Force[J]. Journal of Semiconductors, 2007, 28(9): 1454-1458. ****Fang D M, Fu S, Zhou Y, Zhao X L. A Tunable Micromechanical Capacitor Driven by Electrostatic Force[J]. Chin. J. Semicond., 2007, 28(9): 1454.
      Citation:
      Fang Dongming, Fu Shi, Zhou Yong, Zhao Xiaolin. A Tunable Micromechanical Capacitor Driven by Electrostatic Force[J]. Journal of Semiconductors, 2007, 28(9): 1454-1458. ****
      Fang D M, Fu S, Zhou Y, Zhao X L. A Tunable Micromechanical Capacitor Driven by Electrostatic Force[J]. Chin. J. Semicond., 2007, 28(9): 1454.

      A Tunable Micromechanical Capacitor Driven by Electrostatic Force

      • National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory of the Ministry of Education for Thin Film and Microfabrication,Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200030,China

      • National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory of the Ministry of Education for Thin Film and Microfabrication,Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200030,China

      • National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory of the Ministry of Education for Thin Film and Microfabrication,Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200030,China

      • National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory of the Ministry of Education for Thin Film and Microfabrication,Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200030,China

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      863項目

      • Received Date: 2015-08-18
      • Accepted Date: 2007-03-12
      • Revised Date: 2007-04-16
      • Published Date: 2007-08-31

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