Chin. J. Semicond. > 1995, Volume 16?>?Issue 12?> 921-927

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硅微結構加速度傳感器空氣阻尼的研究

陳宏，鮑敏杭

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    Received: 19 August 2015 Revised: Online: Published: 01 December 1995

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      陳宏，鮑敏杭. 硅微結構加速度傳感器空氣阻尼的研究[J]. 半導體學報(英文版), 1995, 16(12): 921-927.
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      陳宏，鮑敏杭. 硅微結構加速度傳感器空氣阻尼的研究[J]. 半導體學報(英文版), 1995, 16(12): 921-927.

      • Received Date: 2015-08-19

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