Chin. J. Semicond. > 2007, Volume 28?>?Issue 8?> 1295-1301

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MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function

Jia Mengjun, Li Xinxin, Song Zhaohui and Wang Yuelin

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Abstract: Based on the electro-mechanical coupling principle,a shocking-acceleration switch with a threshold adjusting function is presented.The threshold acceleration is set by adjusting the bias voltage.Based on a theoretical analysis for an inertial step-signal,the transient response of the switch in terms of half-sinusoidal,pulsed,and stepped shocking acceleration is simulated using Coventor-Ware.The threshold of the switches ranges from 1000g to 5000g,and the response time is less than 60μs.A fabricated micro-switch array has been tested,resulting in satisfactory switching capability under shocking acceleration,which agrees well with the design.

Key words: :MEMS, shocking-acceleration switch, threshold adjusting function, latching function, electro-mechanical coupling principle

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    Received: 18 August 2015 Revised: 07 March 2007 Online: Published: 01 August 2007

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      Jia Mengjun, Li Xinxin, Song Zhaohui, Wang Yuelin. MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function[J]. Journal of Semiconductors, 2007, 28(8): 1295-1301. ****Jia M J, Li X X, Song Z H, Wang Y L. MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function[J]. Chin. J. Semicond., 2007, 28(8): 1295.
      Citation:
      Jia Mengjun, Li Xinxin, Song Zhaohui, Wang Yuelin. MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function[J]. Journal of Semiconductors, 2007, 28(8): 1295-1301. ****
      Jia M J, Li X X, Song Z H, Wang Y L. MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function[J]. Chin. J. Semicond., 2007, 28(8): 1295.

      MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function

      • Graduate University of the Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

      • Received Date: 2015-08-18
      • Accepted Date: 2007-01-04
      • Revised Date: 2007-03-07
      • Published Date: 2007-08-08

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