Abstract: A decoupled silicon micromachined gyroscope with vibration isolation frame is introduced.This structure employs independent suspension beams and inertial masses for the drive and sense modes.The drive and sense structures are separated by the vibration isolation frame,so the cross-coupling between the modes is reduced.The gyroscope is fabricated on the n-type 〈100〉 wafer using TMAH wet-etching and DRIE,and its read-out circuit is designed.Test results show that the frequencies of the drive and sense modes are 2.981 and 2.813kHz,and the quality factors of the drive and sense modes are 800 and 34.The scale factor is measured as 38mV/(°/s) with a nonlinearity of 0.8%.The short-term bias stability of this gyroscope in half an hour is 0.28°/s.

Key words: silicon micromachined gyroscope,  decoupled structure,  vibration isolation frame