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J. Semicond. > 2008, Volume 29?>?Issue 10?> 1907-1912

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Mechanic-Electric Coupling Characteristics of a Resonant Tunneling Diode

Tong Zhaomin, Xue Chenyang, Lin Yijie and Chen Shang

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Abstract: This paper reports the piezoresistive effect of a resonant tunneling diode (RTD) in a microstructure.The four-beam structure is analyzed and fabricated by positing RTDs at the stress sensitive regions.Stress along the ［110］ orientation and ［110］ orientation induces a change in the RTD’s current-voltage (I-V) curves,i.e.,the meso-piezoresistance variety,mainly in its negative different resistance (NDR) region.By different methods,the mechanic-electric coupling characteristic of RTD is studied and the consistent 1E-9Pa-1 piezoresistive coefficients are discovered.

Key words: piezoresistive effect, RTD, NDR, mechanic-electric coupling

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    Received: 18 August 2015 Revised: 18 June 2008 Online: Published: 01 October 2008

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      Tong Zhaomin, Xue Chenyang, Lin Yijie, Chen Shang. Mechanic-Electric Coupling Characteristics of a Resonant Tunneling Diode[J]. Journal of Semiconductors, 2008, 29(10): 1907-1912. ****Tong Z M, Xue C Y, Lin Y J, Chen S. Mechanic-Electric Coupling Characteristics of a Resonant Tunneling Diode[J]. J. Semicond., 2008, 29(10): 1907.
      Citation:
      Tong Zhaomin, Xue Chenyang, Lin Yijie, Chen Shang. Mechanic-Electric Coupling Characteristics of a Resonant Tunneling Diode[J]. Journal of Semiconductors, 2008, 29(10): 1907-1912. ****
      Tong Z M, Xue C Y, Lin Y J, Chen S. Mechanic-Electric Coupling Characteristics of a Resonant Tunneling Diode[J]. J. Semicond., 2008, 29(10): 1907.

      Mechanic-Electric Coupling Characteristics of a Resonant Tunneling Diode

      • National Key Laboratory of Electronic Measurement Technology,Key Laboratory of Instrumentation Science ＆ Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China

      • National Key Laboratory of Electronic Measurement Technology,Key Laboratory of Instrumentation Science ＆ Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China

      • National Key Laboratory of Electronic Measurement Technology,Key Laboratory of Instrumentation Science ＆ Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China

      • National Key Laboratory of Electronic Measurement Technology,Key Laboratory of Instrumentation Science ＆ Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China

      • Received Date: 2015-08-18
      • Accepted Date: 2008-01-12
      • Revised Date: 2008-06-18
      • Published Date: 2008-11-11

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