Chin. J. Semicond. > 1995, Volume 16?>?Issue 7?> 546-551

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    Received: 19 August 2015 Revised: Online: Published: 01 July 1995

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      何治平，周祖堯，徐宏來，林成魯. 硅中低能大傾斜角砷注入的損傷行為及其退火特性[J]. 半導體學報(英文版), 1995, 16(7): 546-551.
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      何治平，周祖堯，徐宏來，林成魯. 硅中低能大傾斜角砷注入的損傷行為及其退火特性[J]. 半導體學報(英文版), 1995, 16(7): 546-551.

      • Received Date: 2015-08-19

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