Abstract: The design and fabrication of on-chip LC low/band-pass filters are presented,and the filters are accomplished with MMIC process.Measurement results show that the Q of a 3nH inductor is 13.8 at 6.8GHz and the self-resonant frequency is 15.5GHz.The measured cutoff/center frequencies of low/band-pass filters agree with the design,and the contrast are 2% and 3.3% respectively.The insertion loss of low-pass filters is less than 3dB,and the insertion loss of band-pass filter is 7.2dB at the center frequency.

Key words: LC passive filter, inductor, capacitor, MMIC