Abstract: We present a detailed routing algorithm considering the optical proximity effect.The light intensity is calculated beforehand and stored in look-up tables.These costs are used as a constraint to guide the sequential routing.The routing algorithm is based on constructed force directed Steiner tree routing to enhance routing efficiency.Experimental results on industrial benchmark circuits show that the presented routing algorithm can obtain much improvement considering optical effects short runtime.

Key words: optical proximity effect,  detailed routing,  Steiner tree,  yield