Abstract: We designed a high-precision array pulse sensor for TCM (traditional Chinese medicine) that can directly transform pulse-pressure signal into electric current signal and is compatible with CMOS technology.We adopted a sacrifice-layer craft for the transistor gate.During testing,we found that the precision of the capacitor for the array sensor is 0.5fF/hPa when the pressure was changing within the range of 1.5kPa to 9.5kPa.More importantly,the output-current and the pressure of the sensor have a good linearity and exponential characteristics.According to the data from the experiment,we conclude that the characteristic of the response-current is related to the area of the MOS gate.

Key words: array senor, pulse senor, MOSFET gate, linearity