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J. Semicond. > 2008, Volume 29?>?Issue 4?> 789-793

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Optimization of a Thermoelectric Microwave Power Sensor

Han Lei, Huang Qing’an and Liao Xiaoping

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Abstract: A 2D analytical model of the thermal distribution of a thermoelectric microwave power sensor is presented.In order to optimize the size of the sensor,the influences of various structure parameters on the thermal distribution are analyzed.The paper presents the design principle of the parameters,including the membrane thickness,the distance between the matched resistor and the hot junctions of the thermopile,and the suspended length of the thermopile,to achieve high sensitivity.The analytical results agree well with the Ansys simulative results.

Key words: thermoelectric, microwave power, analytical model, 2D thermal distribution

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    Received: 18 August 2015 Revised: 08 October 2007 Online: Published: 01 April 2008

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      Han Lei, Huang Qing’an, Liao Xiaoping. Optimization of a Thermoelectric Microwave Power Sensor[J]. Journal of Semiconductors, 2008, 29(4): 789-793. ****Han L, Huang Q, Liao X P. Optimization of a Thermoelectric Microwave Power Sensor[J]. J. Semicond., 2008, 29(4): 789.
      Citation:
      Han Lei, Huang Qing’an, Liao Xiaoping. Optimization of a Thermoelectric Microwave Power Sensor[J]. Journal of Semiconductors, 2008, 29(4): 789-793. ****
      Han L, Huang Q, Liao X P. Optimization of a Thermoelectric Microwave Power Sensor[J]. J. Semicond., 2008, 29(4): 789.

      Optimization of a Thermoelectric Microwave Power Sensor

      • Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China

      • Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China

      • Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China

      Funds:

      國家自然科學基金

      • Received Date: 2015-08-18
      • Accepted Date: 2007-09-17
      • Revised Date: 2007-10-08
      • Published Date: 2008-04-03

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