香蕉久久这里只有精品-91国产自拍免费视频-免费A级毛片无码专区网站-无码八A片人妻少妇久久-特黄三级又长又粗又爽-国产精品人成在线播放-国产男女猛烈无遮挡性视频网站-丰满五十路熟女高清免费视频-欧美日韩午夜激情福利

J. Semicond. > 2008, Volume 29?>?Issue 10?> 2043-2049

PAPERS

MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis

Gao Chaoqun, Jiao Binbin, Liu Maozhe, Li Quanbao, Yang Kai, Shi Shali, Li Zhigang, Ou Yi, Jing Yupeng and Chen Dapeng

+ Author Affiliations

PDF

Abstract: A novel MEMS/CMOS compatible gas sensor based on spectroscopy analysis,which is fabricated on a (110) silicon wafer,is proposed.Its main principle,structure,and fabrications are introduced in detail.The gas sensor gains high sensitivity and selectivity but has low power consumption,and it should detect the grads of gas concentration for the mentioned advantages.

Key words: MEMS, gas sensor, spectroscopy analysis

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 3296 Times PDF downloads: 1349 Times Cited by: 0 Times

    History

    Received: 18 August 2015 Revised: 22 April 2008 Online: Published: 01 October 2008

    Catalog

      Email This Article

      User name:
      Email:*請輸入正確郵箱
      Code:*驗證碼錯誤
      Gao Chaoqun, Jiao Binbin, Liu Maozhe, Li Quanbao, Yang Kai, Shi Shali, Li Zhigang, Ou Yi, Jing Yupeng, Chen Dapeng. MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis[J]. Journal of Semiconductors, 2008, 29(10): 2043-2049. ****Gao C Q, Jiao B B, Liu M Z, Li Q B, Yang K, Shi S L, Li Z G, Ou Y, Jing Y P, Chen D P. MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis[J]. J. Semicond., 2008, 29(10): 2043.
      Citation:
      Gao Chaoqun, Jiao Binbin, Liu Maozhe, Li Quanbao, Yang Kai, Shi Shali, Li Zhigang, Ou Yi, Jing Yupeng, Chen Dapeng. MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis[J]. Journal of Semiconductors, 2008, 29(10): 2043-2049. ****
      Gao C Q, Jiao B B, Liu M Z, Li Q B, Yang K, Shi S L, Li Z G, Ou Y, Jing Y P, Chen D P. MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis[J]. J. Semicond., 2008, 29(10): 2043.

      MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

      • Received Date: 2015-08-18
      • Accepted Date: 2008-03-21
      • Revised Date: 2008-04-22
      • Published Date: 2008-11-11

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return