Abstract: A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed.The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting combs.The sensing method of changing capacitance area is used in the design, which depresses the requirement of the DRIE process, and decreases electronic noise by increasing sensing voltage to improve the resolution.The parameters and characteristics of the biaxial microaccelerometer are discussed with the FEM tool ANSYS.The simulated results show that the transverse sensitivity of the sensor is equal to zero.The testing devices based on the slide-film damping effect are fabricated, and the testing quality factor is 514, which shows that the designed structure can improve the resolution and proves the feasibility of the designed process.

Key words: capacitive accelerometer, inertial sensor, high resolution, MEMS